Photomask Equipment by SUSS
SUSS suite of Wafer / Reticule cleaning and Photomask fabrication equipment features both wafer and mask cleaning systems with semi and fully automatic processing capabilities.
Fully automated mask fabrication equipment including bake, clean and develop, from standard through to EUVL and NIL requirements.
HMx Series
Semiautomatic mask cleaning, developing, etching and resist stripping equipment.
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ASX Series
Fully automated photomask production platform for 250-65nm technology nodes.
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MaskTrack Pro
Next-generation lithography for photomask clean, bake and develop.
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SUSS
See the full SUSS product range
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Further Information
What is a Semiconductor Photomask?
A semiconductor photomask is a critical component in the photolithography process used to manufacture integrated circuits (ICs) and other microelectronic devices
Photomasks (sometimes called a mask or reticle) are flat, transparent plates, usually made of quartz or glass that mirror the circuit pattern for one layer of a microchip.
During photolithography, light passes through the transparent regions of the photomask and is blocked by the opaque areas, transferring the circuit design onto a photoresist-coated substrate.
Key aspects of a photomask:
- Photomasks act as a stencil, defining where material will be etched or deposited on the wafer.
- Multi-Layer Process: Modern chips require multiple layers, so a complete device may need 5 to 40+ individual photomasks, known as a mask set.
- Cleanliness: Even microscopic errors in a photomask can lead to defective chips, making cleanliness essential.
Inseto Knowledge Base Document:
Read our guide to the “Semiconductor Photolithography Basics“
Wiki – Semiconductor Device Fabrication
Applications
UV Lithography, Wafer Resist Coating with Spin, Spray or Puddle Dispense, Resist Developing, Wafer Cleaning, Metal Layer Lift Off, Baking, Wafer Prime etc.
Industry Segments
Wafer level chip-scale packaging, flip chip packaging, bumping, MEMS, LED, power devices, optical components and compound substrates and other semiconductor related device R&D applications
SUSS Website
Region
United Kingdom, Ireland, Sweden, Finland, Norway & Iceland
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