Low Cost Plasma Cleaner: PE-25

The PE-25 is an entry-level, low-cost Plasma Cleaner, developed for processing up to 75x150mm samples in research-development labs, production facilities & universities.

The PE-25 is exceptionally user friendly and produces consistent results every time, featuring a robust aluminium chamber, RF powered electrode and automatic process sequence. All timed events (pump-down, plasma, gas stabilization and vent) can be easily programmed, with a one button operation initiating the sequence.

PE-25 features include:

• Durable Welded Round Aluminium Vacuum Chamber
• Chamber Dimensions: 200mm Deep x 125mm Diameter (8×5″)
• Single 90x180mm RF Powered Electrode (3.5×7″)
• 57mm of Chamber Height Clearance (2.5″)
• 200W 20-80KHz Auto Frequency Tuning With Adjustable Pulsing Rate
• Automatic Matching Network
• One Rotometer Gas Control: 0-25cc/min
• Thermocouple Vacuum Gauge: 0-1Torr
• PLC Microprocessor Control System
• Keypad user interface with alphanumeric display
• Storage of one Process Recipe
• Automatic Process Sequencing
• Console Dimensions: 355Wx370Dx455H mm (14×14.5×18″)
• Approximate Shipping weight is 25Kg
• Electrical: 230/240VAC, 14A

Options:

• 5 CFM 2-Stage Direct Drive Oil Vacuum Pump
• 100 watt, 13.56 MHz RF Generator with auto tuner
• 2nd Rotometer / Gas Inlet