Manual LAB Assistant Wafer Probe Station with Test Instruments

Specific Requirements:

A University was looking for a small footprint, turn-key probing and testing solution that would allow them to characterize devices on semiconductor wafers.

SemiProbe Solution:

• LA-100 manual 100 mm probe system:
  • Manual wafer stage with coarse and fine X, Y, Z, and theta movement
  • 100 mm triaxial wafer chuck with concentric vacuum rings to hold die, partial wafers, and whole wafers up to 100 mm
  • A platen with a platen lift that accommodates individual manipulators or a probe card holder
  • Vibration isolation table with casters and leveling feet
• Removable front-wedge
• Microscope:
  • A rigid microscope post
  • 100 mm x 100 mm XY coaxial microscope movement with axes locking knobs
  • Compound optics zoom tube with objectives – 2x, 10x and 20x
  • CCTV System Kit – with monitor, cables, power supply and a monitor stand
• Four (4) manual MA-9000 manipulators with magnetic bases, triaxial probe arms and Picoprobe active probe arms
• Assortment of tungsten probe tips
• Keithley 4200 Semiconductor Characterization System with rigid support shelf