Manual PS4L Wafer Probe Station for Magnetic Stimulation

Specific Requirements:

The European customer wanted to use a magnetic stimulation manual probe station to test 150 mm MRAM wafers using a magnet placed underneath the device that could be moved in X, Y, Z and theta. The device would be contacted from the top with up to five manual three-axis manipulators with coaxial probe arms and DC probes while being stimulated by the magnet located beneath the device. The customer needed the ability to test the devices from the top at temperature ranging from ambient to 225 °C.

SemiProbe Solution:

• PS4L M-6 MSS Manual 150 mm probe system with magnetic stimulation:
  • 150 mm programmable X, Y, Z and theta stage
  • Rapid Align Stage provides both coarse and fine stage movement
  • Vibration isolation table
  • 150 mm wafer carrier that supports 150 mm wafer with and without glass support
• Compound microscope bridge with 100 mm x 100 mm of X-Y travel and manual Z lift
• Compound Optics with CCTV System and monitor stand
• Five manual three-axis manipulators with coaxial probe arms, cables, DC probes and vacuum bases
• GMW 5201 magnet, water cooling source, regulator and power supply
• Thermal Wand System that allows the wafers to be heated from ambient to 225 °C.
• Air compressor and Vacuum Pump