Semiautomatic PS4L Wafer Probe Station for Magnetic Stimulation

Specific Requirements:

A Government Laboratory wanted a multi-purpose 200 mm semiautomatic probe system for magnet stimulation and high voltage measurements up to 3 KV. . The contact to the device under test (DUT) was made using manual manipulators configured with low and high voltage triaxial probe arms.

SemiProbe Solution:

• PS4L SA-8 MSS Semiautomatic 200 mm probe system with magnetic stimulation:
  • 200 mm programmable X, Y, Z and theta stage
  • Control electronics, PC and monitor
  • PILOT Software Suite – Navigator, Wafer Map and Autoalign
• Integrated GMW Model 5203 Vertical Projected Field Electromagnet with power supply, recirculating water chiller and Hall Effect Calibration Kit
• Interchangeable carrier plates for MSS measurement application – whole wafers and individual die
• 100 mm 3KV chuck with triaxial kelvin connections
• Eight (8) manual manipulators with low and high voltage triaxial probe arms
• Dark Box with remote light source, interconnect panel with low and high voltage feedthroughs and safety interlock system
• Vibration Isolation Table with adjustable monitor/keyboard and mouse rack