Chemical Wet Bench for Semiconductor Fabrication
MOT manufactures and develops chemical wet bench equipment for the fabrication of semiconductor devices in both research laboratories and industrial production environments. The equipment produced by MOT supports a variety of wet-chemical, cleanroom processes. These include electro-plating, etching, cleaning, and porous silicon formation, plus custom semiconductor applications.
Why Choose MOT’s Chemical Wet Bench Equipment?
MOT’s advanced systems are modular and customisable, and are designed to support many wet chemical processes. This allows for precise and flexible chemical processing.
Whether you require wafer plating, etching, cleaning, or forming porous silicon, MOT delivers dependable equipment tailored precisely to your process requirements.
Key benefits include:
- Turnkey set bench solutions for cleanroom microfabrication
- Modular design for flexible configuration
- Custom engineering for specialised applications
- Process optimisation and integration support
MOT provides equipment solutions that include service, support, process optimization, and startup. They also offer custom engineering and process development. A modular approach lets you combine different functions and chemical processes into one system. This provides a complete solution for your semiconductor fabrication needs.
MOT was started as a supplier of galvanic systems. These systems are used in clean rooms, production areas, and research labs. MOT’s equipment can be found throughout a wide range of process technologies in the semiconductor, microtechnology, electronics and optical industries. MOT offers complete production solutions as well as specialist designed equipment on request of their customers.
Get Expert Advice on Wet Bench Equipment
Inseto provides full support from initial consultation to installation and after-sales service. Our team of experts are here to help you choose and set up the best chemical wet bench equipment for your needs. Visit our Knowledge Base for helpful guides, or contact us for free technical advice: enquiries@inseto.co.uk or call +44 1264 334505.
Wet Bench Plating Systems
The electroforming unit µGalv is an advanced plating system for both semiconductor wafer and panel plating.
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Wet Bench Etching Process Tool
The etching unit µChem is a modular wet bench tool. It is used for standard wet chemical processes in semiconductor fabrication.
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Porous Silicon Formation Wet Bench
The µPorSi porous silicon formation system is designed to allow the wet chemical fabrication of porous silicon substrates.
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Electrochemical Etch Stop Wet Bench
The µChem-ECES wet bench for chemical etching employs the cost effective edge stop to precisely control the etch process.
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Configurable Wet Bench Microfabrication Tool
The µLAB is a configurable microfabrication tool for a range of semiconductor processes.
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Spin Rinse Dryer – SRD
The MOT µSRD is a modern spin-rinse-dryer. It is made to clean and dry semiconductor wafers in batches.
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Further Information
What is a Chemical Wet Bench?
A chemical wet bench is a specialised workstation used for wet processing, primarily in semiconductor fabrication, MEMS, solar, LED, and biomedical industries. It usually has several tanks or modules. These hold chemicals for cleaning, etching, stripping, or plating materials like silicon wafers. These systems can be manual, semi-automated, or fully automated, depending on the application and throughput requirements.
Wet benches are designed to handle corrosive chemicals safely and often include features like:
- Quick dump rinse (QDR) and heated baths
- Laminar flow units for cleanroom compatibility
- Automated chemical dosing and drainage
- Safety interlocks and exhaust systems
- Process monitoring and data logging
Inseto Knowledge Base Document:
Read our guide to the “Semiconductor Photolithography Basics“
Wiki – Semiconductor Device Fabrication
Wet Bench Applications
Etching of wafers and substrates, plating, making vias, cleaning, and forming porous silicon for microfluidic devices. This includes power semiconductors, MEMS devices, compound and GaN materials, as well as photonic, photovoltaic, and LED components.
Industry Segments
Semiconductor Wafer Fabrication, University Research and Development, Microtechnology and electronics, Optical and Photonics industries.
MOT Mikro Website
Region
United Kingdom, Ireland, Finland, Sweden, Denmark, Estonia, Iceland & Norway
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