uLAB Configurable Wet Bench Microfabrication Tool

The configurable microfabrication unit μLab is an advanced wet bench processing tool enabling cleanroom processes for a range of industries, such as MEMS, semiconductor and microfluidics. μLab is the ideal equipment for industrial or R&D demands due to the flexible arrangement and customisable build-up of process capabilities. These systems are suitable for substrates, segments and wafer diameters up to 300 mm.

MOT can help to design and implement custom modules, automation solutions and other features to optimise the workflow and improve process outputs. MOT’s applications laboratory in Germany has all necessary tools to process and measure wafers, to provide the optimum in system configuration, performance and results.

The μLab enables you to specify the modules to be integrated from a variety of OEM partners with customisable modules such as spin coating of photoresists, heat treatment (both hot and cold plates), wafer level cleaning, post exposure photoresist development and other related wet processes.

A variety of general options are available alongside more customer specific configurations. These general options include Automatic and Semiautomatic Handling (Dry in – dry out); Integration of pre/post process cells, such as Etching and Spin Rinse Drying (SRD) modules; and Laminar Flow Units.