Oxide Wafer – SiO₂ Coatings
Our SiO₂ coated silicon wafers are available in a wide range of diameters, thicknesses, and oxide types, allowing precise customisation to suit specific device, process, and application requirements.
What is an Oxide Wafer?
An oxide coated semiconductor wafer is a silicon or compound semiconductor substrate that has been coated with a thin layer of oxide, most commonly silicon dioxide (SiO₂), to serve as an insulating, passivating, or masking layer in microelectronic and MEMS device fabrication.
Key Features of Oxide Wafers
- Coating method, Atmospheric Thermal Oxide: Wet or Dry, PECVD
- Oxide thickness and uniformity, nanometres to several microns
- Single or Double-Side Coatings
- Underlying substrate material, Silicon, compound semiconductor, etc
Buy SiO₂ Oxide Wafers online
We maintain a large inventory of different Oxide wafer types for rapid dispatch. Browse our “Online Semiconductor Wafer Store” to view current stock and technical specifications.
- Extensive Inventory: A wide selection wafer sizes & thicknesses
- Fast Global Shipping: Rapid dispatch from our UK warehouse
- Custom Processing: Wafer thinning, dicing, bumping and more
- Expert Support: Technical advice to help you select the right wafer
- No Minimum Order: Perfect for both R&D and production environments
- Quality Assurance: All wafers undergo rigorous inspection processes
Oxide Wafers for demanding Semiconductor and Microfabrication Applications
Inseto supplies an extensive range of silicon dioxide (SiO₂) coated oxide wafers. Produced using advanced oxidation techniques, our coating processes deliver excellent surface uniformity, consistent film quality, and reliable dielectric performance. This ensures the wafers are suitable for demanding semiconductor and microfabrication applications.
Silicon dioxide is a highly stable dielectric material that provides excellent electrical insulation and is fully compatible with standard semiconductor manufacturing techniques. As a result, each wafer we supply is engineered to meet the rigorous requirements of research, development, and high‑volume production environments.
About the Wafer Oxidation Processes
To produce a thermal oxide layer, two main Atmospheric Thermal Oxide (ATOx) high temperature processes are commonly used: dry oxidation and wet oxidation.
Dry oxide is ideal for applications requiring thin oxide layers, as it grows slowly and offers excellent film quality. In contrast, wet oxidation uses steam as the oxidising agent, enabling faster growth rates. This makes it well-suited for thicker oxide layers, where high throughput is more important than ultratight uniformity.
Another widely used method for creating an oxide wafer is Plasma-Enhanced Chemical Vapour Deposition (PECVD). PECVD operates at significantly lower temperatures than thermal oxidation, making it ideal for temperature sensitive substrates. It is also commonly selected when single sided oxide coatings are required.
Why Coat a Silicon Wafer with Silicon Dioxide?
Silicon dioxide coatings are used on semiconductor wafers to help to electrically insulate different parts of a device. The oxide growth also protects the surface from contamination. They also act as a mask during etching or doping processes. Additionally, the coatings improve adhesion for subsequent layers. The most common thermal oxidation processes and resultant properties comprise:
- Atmospheric Thermal Oxide (ATOx): High-quality, double-sided oxide coatings
- Dry Thermal Oxide: Dense, thin, uniform oxide coatings
- Wet Oxide: Thicker oxide coatings with faster growth
- PECVD / LPCVD: Single-sided oxide coatings produced at lower temperatures
Got a Question About Oxide Wafers?
Curious about semiconductor materials and how to choose the right oxide wafer? Explore our “Semiconductor Wafer Selection Guide” for expert insights. You’ll also find a wealth of information in our free “Knowledge Base“, covering semiconductor processes, technologies, and more.
Choosing the right Oxide wafer can be complex, especially if you’re unsure about specifications or material types. That’s why Inseto offers expert guidance to help you make the best choice for your application.
Whether you’re developing a new product or refining an existing process, Inseto’s team of experts is here to help. From selecting the right semiconductor wafer to onsite training, we provide technical guidance, documentation, and support for your production needs.
Applications for Oxide Wafers
Key Applications
Inseto’s high purity oxide coated silicon wafers are used across a wide range of semiconductor and microfabrication processes. Key applications include:
- Etch-Stop and Masking Layers: Thermally grown SiO₂ provides excellent chemical stability and dimensional control, making it ideal as an etch-stop layer in MEMS and multilayer device fabrication.
- Interlayer Dielectrics (ILDs): In advanced semiconductor packaging, the wafers are used to electrically isolate conductive layers. This reduces parasitic capacitance and supports high-density interconnects.
- 2D Material Substrates: The wafers are widely used for exfoliating and identifying 2D materials such as graphene. Their controlled oxide thickness and refractive index enable high-contrast optical flake detection under standard microscopy.
Oxide Wafers Product Range
Wafer Specifications
- SiO₂ Silicon Oxide Type: ATOx Thermal (Dry/Wet), PECVD
- Oxide Thickness: Nanometres to several microns
- Available in: Single- or Double-Side Coatings
- Available on: a variety of substrate materials & thicknesses
- Available on: FZ, CZ & Intrinsic Silicon Wafers
- Wafer Diameters: 50mm (2″), 100 mm (4″), 150 mm (6″), 200 mm (8″), 300 mm (12″)
- Optional Features: Dicing, Laser marking, flat or notch orientation, backside oxide
- Supply and Shipment: Worldwide
Knowledge Base Articles
Related Products
Further Information
Wiki – Thermal Wafer Oxidation Description
Oxide Wafer Applications
2D Materials Exfoliation, Graphene Research, Power Electronics, Medical Devices, CMOS, Microfluidics, MEMS Devices, Sensors, Photonic Components, Renewable, Energy Harvesting etc.
Industry Segments
Semiconductor & Related Research and Manufacturing, Coating Development, Adhesion Testing etc.
Region
You can buy Semiconductor Wafers directly from Inseto with fast delivery available worldwide.
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