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Coated Wafer W-NITRIDE 02/003-03

Code
W-NITRIDE 02/003-03 Category:
Diameter
50mm
Material
Si
Type
N
Crystallographic Orientation
100
Dopant
As_doped
Growth Method
CZ
Grade
PRIME
Resistivity
0.001 - 0.005 Ohm.Cm
Thickness
280 ±25um
Polish
SSP
Alignment Fiducial
SSF
Coating Type
LPCVD
Coating Thickness
70nm
Other
Si3N4

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