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Coated Wafer W-NITRIDE 06/001

Code
W-NITRIDE 06/001 Category:
Diameter
150mm
Material
Si
Type
N
Crystallographic Orientation
100
Dopant
P_doped
Growth Method
CZ
Grade
PRIME
Resistivity
10 - 20 Ohm.Cm
Thickness
675 ±20um
Polish
SSP
Alignment Fiducial
SSF
Coating Type
LPCVD
Coating Thickness
40nm
Other
Si3N4

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