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SOI Wafer W-SOI 04/027

Code
W-SOI 04/027 Category:
Wafer Diameter
100mm
Material
SOI
Type
I
Crystallographic Orientation
111
Device Thickness
5 um
Growth Method
FZ
Device Resistivity
10000 Ohm.Cm
BOx
0.1
Handle Thickness
380 um
Growth Method
FZ
Handle Resistivity
10000 Ohm.Cm
Backside
DSP
Other
LPCVD

£TBC

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