Benchtop Plasma Cleaner: PE-50XL

The Plasma Etch, Inc. PE-50XL has all the features as the PE-50, however it comes with a 200w x 225d x 100h mm (8″ w x 9″ d x 4″ h) chamber for those looking to process larger applications. The system features an implosion proof rectangular welded Aluminium Vacuum Chamber and a direct powered RF electrode for optimum cleaning and etching.

The PE-50XL was developed to process parts for smaller production facilities, R&D facilities and Universities. Applications include cleaning or stripping medical devices, solar cells, printed circuit boards, connectors, MEMs, nanotechnology, wafer level packaging, as well as many other related semiconductor processes.

PE-50XL features include:

• Durable Welded Aluminium Vacuum Chamber
• Chamber Dimensions: 200x225x100mm (8″x9″x4″)
• Single 175x200mm RF Powered Electrode
• 200W 20-80KHz Auto Frequency Tuning with Adjustable Pulsing Rate
• 2 Rotometer Gas Control 0-25cc/min
• Pirani Vacuum Gauge, 0-1Torr
• PLC Microprocessor Control System
• Keypad user interface with alphanumeric display
• Storage of one Process Recipe
• Automatic Process Sequencing
• 5 CFM Oxygen Service Vacuum Pump
• Pump footprint 175x400mm (7” x 16”)
• Console Dimensions: 350x350x450mm (14x14x18″)
• Approximate Shipping weight is 45Kg
• Electrical: 230/240VAC, 14A

Options:

• 5 CFM 2-Stage Direct Drive Oil Vacuum Pump
• 150W, 13.56MHz Generator & Automatic Matching Network
• Light Status Traffic Light Bar
• Mass Flow Meter