Semiautomatic Wafer Probing Equipment
SemiProbe offer a range of semiautomatic wafer probing systems ideal for Research Centres, Universities, Laboratories and for production test.
Producing two separate model ranges of semiautomatic wafer probing systems, virtually any application including teaching, research, characterisation, verification, failure analysis and development can be performed, on a wide variety of semiconductor devices, materials and applications.
The model range comprises:
The mini-Probe-System-for-Life (mini-PS4L) is a modular low cost manual probe station, designed for basic characterization and small sample testing solutions of individual die, up to 100mm diameter devices. The system is available in either manual or semiautomatic configurations.
The Probe-System-for-Life (PS4L) is an advanced, modular wafer probing system where all of the basics components, including the bases, stages, chucks, microscope mounts and manipulators, are interchangeable, upgrade-able, and configurable. With its extensive range of hardware and software options, systems can be configured to suit virtually any application or specific probe testing requirements – please see our application specific examples for further details. The PS4L is available in either manual (-M), through semi automatic (-SA) and fully automatic (-FA) configurations.

Semiautomatic Wafer Probing Station: mini-PS4L
A modular low-cost wafer probe station for small samples up to 100mm diameter.

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Semiautomatic Wafer Prober
Modular high-performance semiautomatic wafer probing systems, for wafers from 75 mm to 300 mm.

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SemiProbe
See the full SemiProbe Wafer Probe Station product range

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Further Information
What is a Semiautomatic Wafer Probe Station?
A semiautomatic probe station is a wafer probing system that combines automated wafer positioning with manual or programmable probe placement to enable faster, more repeatable electrical testing of semiconductor devices.
Compared to manual probe stations, semiautomatic systems use motorised stages and software control to move the wafer accurately between test sites, improving throughput and measurement consistency while retaining flexibility for development and characterisation work.
Key characteristics of semiautomatic wafer probe station include:
- Motorised wafer stage for automated and repeatable movement between test sites
- Manual or programmable probe positioning, retaining flexibility for probing tasks
- Software driven operation, allowing recipe based testing and precise alignment
- High positional accuracy for consistent measurement results across wafers
Inseto Knowledge Base Document:
Read our guide to the “What is a Probe Station and How Does it Work?“
Wiki – Wafer Testing Description
Applications
Microelectronic Devices, Multi-Chip-Modules Testing, Semiconductor Wafer Probe, Device Development & Characterisation, RF-HF Devices, Bio Medical Assemblies, Nano Electronics, Packaged Device Test, MEMS, Spintronics, Carbon NanoTube, Semiconductor Components, Research Testing, Microfluidic Testing, Photovoltaic Device Test etc.
Industry Segments
Universities, Research Development & Characterisation, Production Test, Semiconductor Production, Medical, Photonics, Solar Cell, Nanoelectronics, Fibre Optics, Microwave Electronics, Microelectronics, Power Semiconductor Assembly, Power Electronics
SemiProbe Website
Region
Europe, including: Austria, Belgium, Bulgaria, Czechia, Denmark, Finland, France, Germany, Ireland, Italy, Netherlands, Norway, Poland, Spain, Sweden, Slovakia, Switzerland, Türkiye, United Kingdom, etc.
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