Fully Automatic Wafer Probe Equipment: PS4L-FA

SemiProbe provides a family of fully automatic wafer probe equipment with several unique models to choose from. They are robust, high speed solutions for analytical or production wafer probing of semiconductor wafers and are equipped with cassette holders, pre-aligners, and robotic systems with end effectors designed specifically for the application.

The range equipment includes automatic probe systems for 100, 150, 200, 300 mm and 450 mm wafers, with a modular design that enables future upgrades for functionality, or where additional or different test resources and requirements are needed.

The easy to learn and use PILOT™ control software makes the systems simple to set-up, interface to and operate. Software modules can be added to the base system as needed. Individual customer applications can be integrated with PILOT Control Software for a customized system to meet individual needs. Communications may be made using RS-232, GPIB or TCP/IP, enabling the system to be either a controller or a slave in an integrated solution.

PS4L-FA Automatic Wafer Probe Equipment features include:

• Multiple applications with the same system: DC, High Frequency, OPTO, MEMS & more
• Handles up to 100, 150, 200 and 300 mm wafers & substrates
• Handles trays of die, wafers or wafers sawn on frames with dual end-effector
• Handles thin & warped wafers from 90 um and above
• Flexible PILOT Control Software Suite – alignment, profiling, wafer map, interfaces and more
• Numerous Options – thermal chucks, optics, bar code reader, OCR, manipulators, probe cards and more
• Production & Analytical capabilities, custom configured for your needs and application