uCHEM Wet Bench Etching Equipment

The etching unit μChem is a wet bench etching process tool suitable for all standard wet etch chemical process steps used in the semiconductor, optical, solar-cell and MEMS industries.

The ideal wet etch tool for either industrial or R&D demands due to the flexible arrangement and build-up of the processes modules. The complete system is built from plastics (PP white) or stainless steel to guarantee the maximal resistance against chemical attacks of either acids, bases or solvent processes. The plumbing can be made from PP, PVDF, PFA or SS tubing and the door materials are from a transparent PVC.

The MOT team additionally offers customised solutions tailored to the specific technical details of your wet etch chemical process. The applications lab in Germany has all necessary tools to process wafers, measure results and optimise the configuration to help select chemistries and advise you on the options available each step of the way.

Suitable for wafer sizes up to 300 mm the μChem etching system is used for a variety of applications from MEMS and CMOS production to sensor and photovoltaic device fabrication. A variety of options are available from automatic robot handling; overflow circulation with filtration; ultra or mega sonic nozzle dispense units; internal chemical management and the integration of pre/post process cells and laminar flow units. Additional components such as third party spin coater, hotplates and megasonic cleaning systems can be integrated.