uPorSi Porous Silicon Formation Wet Bench

The MOT μPorSi system is designed to enable the formation of porous silicon and add to the range of fabrication techniques supported. The complete production process is offered by MOT as well as support in ramping up to production levels at the installation site.

Porous silicon is a material formed from single crystalline silicon through anodic dissolution in HF containing solutions. Optionally available, an optical window allows for light-assisted porous silicon formation. Customised solutions are available on consultation with the MOT technical team and the flexible arrangement and configuration of the μPorSi system make it the ideal tool for R&D and production environments. 

As with the μChem and μGalv systems the μPorsi is suitable for wafers up to 300 mm in diameter. The system is constructed from white polypropylene (PP) with transparent PVC door materials. The plumbing in the system can be from PP, PVDF or PFA tubing. All systems controlled by a simple, intuitive touch panel.

A variety of options are available from automatic robot handling; light assisted porous silicon formation; fully metal ion free water processing; internal chemical management and the integration of pre/post process cells and laminar flow units.