ECD8 Compact Resist Coater or Developer

The SUSS ECD8 is a compact semi automatic coating or developing platform designed for research, development and small scale production environments processing substrates up to 200 mm. The system combines flexible configuration with a small footprint, making it well suited to cleanrooms where space efficiency, ease of use and reliable process control are essential.

Available as either a resist coater or a resist developer, the ECD8 can be configured to match specific lithography process requirements while maintaining a consistent operating concept across applications. Its integrated media cabinet removes the need for external cabinets, simplifying installation and preserving valuable cleanroom space.

Operation of the ECD8 is optimised for daily laboratory use. A one hand wafer centring mechanism allows fast and accurate alignment across all round wafer sizes, while the fully transparent enclosure provides complete process visibility throughout coating or developing steps. An intuitive, symbol based touchscreen interface supports straightforward recipe creation and real time monitoring of process parameters, reducing training effort and improving repeatability between users.

The ECD8 delivers precise control for a wide range of coating and developing processes. High spin speeds and acceleration enable uniform film formation, while support for multiple dispense configurations allows processing of materials with viscosities from below 1 cps up to 4,000 cps. Recipe based control with storage for up to 200 process recipes ensures consistent results across development cycles and production runs.

Designed with operator safety and reliability in mind, the ECD8 incorporates high safety standards as standard and draws on SUSS MicroTec’s experience in production proven coating and developing platforms. The result is a robust, flexible system that bridges the gap between manual laboratory tools and larger automated coating and developing equipment.

SUSS also manufacture the LabSpin range of high-performance manual resist spin coat and puddle develop tools and RCD8 range of semi-automatic coating tools.