Automatic PS4L Vacuum Wafer Probe Station

Specific Requirements:

The customer wanted to test 150 mm silicon MEMS wafers in a fully automatic vacuum wafer probe station. The wafers would be mounted in a single cassette into a material handling chamber with a load lock. The material handling unit would remove a wafer from the cassette and place it on a mechanically clamping chuck mounted on the probe system vacuum stage in the chamber. After the alignment, the device testing would be performed using a probe card or individual programmable manipulators with DC and High Frequency (HF) probe arms and probes. Everything within the chamber would need to be vacuum-compatible.

SemiProbe Solution:

• FA-6VP fully automatic 150 mm vacuum wafer probe station:
  • 150 mm programmable X, Y, Z and theta stage
  • PILOT Software Suite – Navigator, Wafer Map, Autoalign and MHU Modules
  • Vibration isolation table with casters, leveling feet and keyboard/monitor rack
• All components in the vacuum chamber rated to 10^-6 torr
• Agilent turbo-molecular vacuum pump
• Probe card holder and probe card
• Four programmable three-axis manipulators with DC and HF probe arms, cables and probes
• Material handling unit (MHU): one 150 mm cassette, pre-aligner and end-effector
• Compound optics with CCTV system