High Frequency Wafer Probe Equipment

SemiProbe’s high frequency wafer probe equipment is for testing high frequency (HF), radio frequency (RF) and microwave devices. HF/RF tests can be performed on individual die, semiconductor wafers or packaged parts for research, characterization or production purposes.

The equipment is configured using the modular Probe System for Life (PS4L) platform, which allows customers to specify and purchase a system according to their exact requirements or budget limitations. Thereafter, the systems can either be upgraded or reconfigured as testing requirements develop or as budgets allow.

The PS4L high frequency probe station is configured with precise micro-manipulators that will interface with Keithley, Keysight, Tesec and other test instrumentation. No other application requires the rigidity and stability of the manipulators as that demanded by HF and microwave testing. Dependent upon configuration, the equipment includes a localised environmental chamber (LEC) to allow the rigorous testing devices across a wide range of temperatures. Thermal wafer chucks are available with a -65°C to 300°C range and feature an extensive range of additional options.

Manual, semi and fully automatic versions are available for processing pieces through 100 to 300 mm wafers. All high frequency test systems are built to ensure user safety when operating at HF, very high frequency (VHF) and ultra-high frequency (UHF). Example HF/RF testing applications include: III-V Transistors, Silicon Carbide Power Devices, RFID Components, 5G filters and MEMS resonators etc.