Manual PS4L Wafer Probe Station for High Frequency Test

Specific Requirements:

The customer was looking for a general-purpose 200 mm manual high frequency (HF) wafer probe station that allowed for the measurement of whole wafers up to 200 mm and individual parts mounted on tape over a variety of frequency ranges. They wanted to use individual manual manipulators with standard west/east HF probe arms that could handle GS, SG, GSG, differential, and multi-contact wedges operating from DC to 40 GHz. In addition, they needed the ability to add manual manipulators for DC bias and a probe card holder for probe cards.

SemiProbe Solution:

• PS4L M-8 manual 200 mm probe station:
  • Rapid Align manual wafer stage with coarse and fine stage travel
  • 200 mm HF chuck with vacuum holes, two auxiliary chucks for calibration substrates
  • Large platen with stainless steel skin, removable front wedge and linear lift
• Microscope:
  • Microscope post with 100 mm of linear X, Y microscope movement
  • Stereo zoom microscope with a long working distance and field of view
  • CCTV system
• Manipulators with magnetic bases:
  • Two MA-9100 manual manipulators with west/east HF arms
  • Two MA-9000 manual manipulators with adjustable probe arm faceplate, coaxial arms
  • Variety of tungsten probe tips for DC bias, HF probe tips, GGB Industries calibration substrates, Junkosha high-frequency cables
• 4.5” probe card holder