Vacuum Wafer Probe Equipment

SemiProbe’s dual stage vacuum wafer probing equipment manufactured in either manual, semiautomatic or automatic configurations, is designed to deliver high performance and accuracy testing of sensors, accelerometers, switches, microbolometers and other devices affected by the resistance of normal atmosphere, before expensive packaging.

Built using the PS4L’s patented technology, SemiProbe manufactures a range of Vacuum Probing Systems that test wafers or substrates in a vacuum environment. Additionally, individual die and broken/partial wafers can be tested with the Vacuum Probing System. All key modules are interchangeable and upgradeable.

Configured on a vibration isolation table, the chamber contains the wafer stage, the chuck system with carrier plate and manipulators. Model dependent, the programmable wafer stage provides up to 305 mm x 305 mm of X, Y movement and has programmable Z and theta stages. Several thermal chuck options are available to provide temperature ranges from -65 to 300°C .

SemiProbe’s vacuum probe stations are ideal for research, laboratory through to production applications. With a comprehensive portfolio of optional accessories and upgrades, equipment can be easily customized to meet a variety of applications and budgets, now and in the future.