Semiautomatic MEMS Vacuum Wafer Probe Station

Specific Requirements:

The customer wanted a semiautomatic MEMS Vacuum Probe Station to test 200 mm silicon MEMS wafers under vacuum and at low and high temperatures (-60 °C to 200 °C). They wanted the ability to use probe cards as well as programmable manipulators with DC and High Frequency (HF) probe arms. The system needed the ability to interface to a variety of Keithley and Keysight test instrumentation. The microscope bridge had to support optics, black bodies and a Polytec MEMS motion analyzer.

SemiProbe Solution:

• PS4L SA-8VP Semi-automatic 200 mm vacuum probe system:
  • 200 mm programmable X, Y, Z and theta stage with control electronics
  • PILOT Software Suite – Navigator, Wafer Map, Autoalign and Programmable Manipulator Modules
  • Vibration isolation table
• Vacuum Chamber:
  • Large vacuum chamber with removable top and front-loading door for easy loading and unloading of devices
  • All components in the vacuum chamber rated to 10^-6 torr
  • Agilent turbo-molecular vacuum pump
• Thermal chuck system that operates from -60 °C to 200 °C
• Large microscope gantry for the simultaneous mounting of optics, black bodies and motion analyzer
• Compound optics with CCTV system
• Programmable manipulators and probe cards:
  • Four programmable three-axis manipulators with coaxial HV (10 kV) and low voltage (600 V) triaxial probe arms, cables and probes
  • Probe card holder – 4.5’’ cards
• Integrated with Keithley Instruments Parametric Analyzer