High Power Wafer Probing Equipment

SemiProbe’s High Power Wafer Probing equipment is for high voltage and high current testing of high power semiconductor wafers and devices.

The equipment is configured using the modular Probe System for Life (PS4L) platform, which allows customers to specify and purchase a system according to their exact requirements or budget limitations. Thereafter, the systems can either be upgraded or reconfigured as needs change or budgets allow.

The high power probe station is integrated with either a dark box, light curtain or vacuum chamber and will interface with Keithley, Keysight, Tesec and other test instrumentation. Dependent upon configuration, the equipment is capable of testing devices in open air, immersed in fluid or in vacuum up to 10 kV and 500 A (pulsed), using either high power probe arms or probe cards; lower ranges (e.g. 3 kV) are also available.

Manual, semi and fully automatic versions are available for processing die through 100 to 300 mm wafers. The systems are also capable of processing thin wafers, can have enclosed wafer chucks with -65°C to 300°C range and feature an extensive range of additional options.

All high power systems are built with a fully guarded, shielded, and interlocked system to ensure user safety.