Manual PS4L 3kV High Power Wafer Probe Station

Specific Requirements:

A Canadian University required a flexible probing solution that would allow them to test wafers with voltage up to 3kV. Volume was low, therefore a manual probe system with manual manipulators and a variety of probe arms were desired. The probe system would get interfaced to a Keysight B1505. Due to lethal voltage levels required to test the devices, a safety enclosure was required. The system also had to pass a Canadian Standards Association (CSA Group) inspection.

SemiProbe Solution:

• PS4L M-6 Manual 150 mm probe system:
  • Rapid align wafer stage with coarse and fine X, Y, Z and theta movement
  • 150 mm wafer chuck with High Voltage (HV) chamber
  • Vibration isolation table
• Compound microscope movement – 50 mm of X and Y and 50 mm of pneumatic Z lift
• Compound optics with CCTV system
• Six manual manipulators with an assortment of probe arms: HV, coax, triax and kelvin
• Dark box with door safety interlocks
• Interconnect panel containing coaxial, triaxial, HV, safety interlock and direct pass-throughs for cables, as well as shelves for Keysight modules