Manual PS4L High Power 200mm Wafer Probe Station

Specific Requirements:

A university customer in Finland required a 200 mm manual high power wafer prober that would test vertical and lateral devices up to 3 KV and over a temperature range of -40 C to 200 C. They required the probe system to be interfaced to a Keysight B1505 Parametric Analyzer.

Due to high voltage levels required to test the devices, a dark box safety enclosure was required.

SemiProbe Solution:

• Manual Probe System – Model PS4L M-8 – a 200 mm manual probe system with coarse and fine wafer stage movement. Coarse stage allows the user to rapidly move in X, Y or diagonally and can be locked in place when in the desired location. The fine stage provides 25 mm of X and Y movement, 20 mm of Z movement and has coarse and fine theta adjustment.
• Thermal Chuck System – a 200 mm thermal chuck system that operates from -40 C to 200 C. The thermal chuck is provided with a gold plated addon surface that operates up to 3 KV triaxial and 10 KV coaxial. Lateral and vertical devices can be tested on the chuck. The chuck has selectable vacuum zones that allow die, partial wafers, and whole wafers up to 200 mm to be tested.
• Large Platen – aluminum with steel skin that allows several manipulators to be placed around the platen opening. Probe cards can also be used. The platen also has a removable front wedge and a linear course and fine vertical lift of 6 mm and 300 um.
• Localized Environmental Chamber (LEC) with a Top Hat – provides EMI shielding, dark shielding, and frost-free probing to -60 C. The top hat allows manipulator probe arms to be placed through the sides to contact the device under test (DUT).
• Microscope Post and Movement – a microscope post with a low-profile coaxial stage allows 100 mm x 100 mm of X & Y optics movement. When in position each axis can be locked.
• Optics – compound zoom tube with a 7:1 zoom range with objectives, an LED light source, and a c-mount camera adapter.
• CCTV System – color camera with a 24” monitor, power supply, and cables
• Vibration Isolation Table – table frame with casters and leveling feet, metric optical breadboard and monitor post.
• Dark Box – serves as a light shield and a safety enclosure – front opening two piece door that raises upwards and lowers for easy LEC access, chuck and CDA switch panel, light, interconnect panel with four (4) low voltage coaxial, four (4) low voltage triaxial, three (3) 3 KV triaxial feedthroughs, a rubberized boot for direct cable and a Keysight safety interlock. The dark box door has safety interlocks that shut the Keysight B1505A down to a safe operating level if the dark box door is opened.
• Manipulators – four (4) manual MA-9000 body with magnetic base, one (1) adjustable probe arm faceplate, one (1) coaxial probe arm, and three (3) 3 KV triaxial probe arms with triaxial cables and connectors.
• Probe Tips – DC & High Voltage – DC = tungsten with 12.5 um radius, HV = 30 um radius that can be used up to 10 KV.
• Probe Card Holder – to handle probe cards that are 150 mm (6”) in width.