Semiautomatic PS4L 300mm High Voltage Wafer Prober

Specific Requirements:

The customer involved with the CERN Program required a flexible 300 mm semiautomatic high voltage wafer prober to test voltage sensor arrays and a variety of other devices. The system would need high and low temperature capabilities. Manual manipulators with a few different standard as well as high voltage (HV) probe arms were required. The system needed the ability to test devices that ranged from 1 kV to 10 kV. The system would get interfaced to Keysight B1505 test instrumentation.

SemiProbe Solution:

• PS4L SA-12 Semi-automatic 300 mm probe system:
  • 305 mm x 305 mm programmable X, Y and Z wafer stage
  • 300 mm thermal chuck with a triaxial HV surface that operates from -60 °C to 200 °C.
  • Localized environmental chamber with a top hat
  • PILOT Software Suite – Navigator, Wafer Map and Autoalign
• Compound microscope bridge with a 50 mm x 50 mm X and Y microscope movement and an 80 mm pneumatic Z lift
• Compound optics and CCTV System
• Six manual manipulators with a variety of probe arms – coax, triax and high voltage (3 kV and 10 kV)
• Vibration isolation table with a laser light safety curtain
• Interlock panel mounted to the plexiglass cover and containing a variety of feedthroughs and a safety interlock