LAB Assistant High Power Manual Wafer Probe Station

Specific Requirements:

A USA automotive manufacturer required a small footprint and flexible manual high power wafer probing solution that would allow them to test 100 mm wafers, chips and packaged parts up to 200 amps. Volume was low so a manual probe system with manual manipulators and a variety of high current (HC) and low voltage DC probe arms were desired. The probe system would get interfaced to a Keysight B1506. Due to the lethal voltage levels required to test the devices, a safety enclosure was required.

SemiProbe Solution:

• LA-100 Lab Assistant manual 100 mm probe system:
  • 100 mm wafer chuck with High Voltage and 3 KV triaxial force and sense connections
• Microscope post with coaxial X and Y microscope movement of 100 mm x 100 mm with locking knobs
• Compound optics with CCTV system
• Two MA-9100 manual manipulators with high current probe arms and one MA-8005 with a coaxial DC probe arm
• Dark box with door safety interlocks
• Interconnect panel:
  • Standard coaxial, triaxial, and 3 kV High Voltage triaxial connectors (force and sense)
  • Rubberized boot for direct passthrough for cables and safety interlock