Manual PS4L MEMS Wafer Probe Station

Specific Requirements:

The customer wanted to test 200 mm silicon MEMS wafers using a manual wafer probe station integrated with a Polytec MSA-500 MEMS Motion Analyzer. The motion analyzer would measure a variety of MEMS devices while in-plane and out-of-plane. The wafer chuck would need to be tilted in a variety of directions. The devices would be contacted with a probe card as well as individual manipulators with coaxial probe arms and DC probe needles.

SemiProbe Solution:

• M-8 Manual 200 mm probe system:
  • 200 mm of X, Y, Z and theta stage
  • Rapid Align Stage provides both coarse and fine stage movement
  • Vibration isolation table
• Integrated with a Polytec motion analyzer
• 200 mm wafer chuck (non-thermal) with X and Y in-plane and out-of-plane dynamic adjustability
• Compound microscope:
  • movement of 50 mm of X and Y
  • pneumatic microscope lift for the motion analyzer
• Six manual three-axis manipulators with coaxial probe arms, cables and DC probes