Semiautomatic PS4L Wafer Probe Station for Microfluidic MEMS Testing

Specific Requirements:

A customer needed a semi-automatic microfluidic MEMS wafer probe test system, which would be used for production testing of 150 mm and 200 mm semiconductor wafers using probe cards. The system required a dispense system and compatibility with Keithley S500 test system.

SemiProbe Solution:

• PS4L SA-8 semi-automatic 200 mm probe system:
  • 200 mm programmable X,Y,Z and theta stage with control electronics
  • 200 mm wafer chuck
  • PC/Monitor and PILOT Software Suite (Navigator, Wafer Map, Autoalign)
  • TMC vibration isolation table with casters, leveling feet and keyboard/monitor rack
• Probe card holder with coarse and fine theta adjustment
• Microscope post with linear and coaxial X and Y microscope movement
• Stereo zoom microscope with 100 mm working distance
• CCTV color camera system with 24’’ monitor
• Custom dispense system – pump with two dispense units
• Test instrumentation – Keithley S500 Series controlled from Automated Characterization Suite software via SemiProbe GPIB driver