Semiautomatic PS4L 300mm Silicon Photonic Probe Station

Specific Requirements:

The customer needed a semi-automatic 300 mm double-sided probing (DSP) system to characterize several different types and sizes of silicon photonic devices in a shielded environment. The system had to test 150 mm, 200 mm and 300 mm wafers and individual die.

SemiProbe Solution:

• PS4L SA-12 semi-automatic 300 mm probe system:
  • Double Sided Probing (DSP) configuration
  • 300 mm programmable X, Y, Z and theta stage
  • Large travel gantry to accommodate a few different types of optics and instruments with independently controlled X, Y, and Z movements – manual and programmable
  • PILOT Software Suite – Navigator, Wafer Map and Autoalign
  • Vibration isolation table
• Universal carrier plate for different sized die, partial wafers and whole wafers up to 300 mm
• Localized Environmental Chamber (LEC) with top-hat to provide dark and EMI shielded environment
• Detector mounted on a small travel programmable stage for optimization of output light collection
• Non-contact height measurement sensor
• Topside and bottom-side optics and cameras
• Manual manipulators for top-side and bottom-side probing
• Probe card holder
• Test Instrumentation Racks