Manual LAB Assistant for High Frequency Wafer Probing

Specific Requirements:

A European customer required a flexible small footprint manual wafer probing solution capable of supporting both DC and high frequency (HF) measurements across a wide range of sample types.

The application involved testing individual die, partial wafers and full 200 mm wafers, including wafers mounted on frames, using both RF and DC probing techniques.

In addition, a controlled test environment was essential, including vibration isolation to ensure measurement stability and a light-controlled dark box enclosure, to support accurate and repeatable probing conditions.

SemiProbe Solution:

A SemiProbe LAB Assistant LA-200 manual probing system was configured to meet the application requirements.

This platform provides a compact, adaptable probing environment suitable for research, development and device characterisation, with a combination of large area, precision positioning, controlled environment and RF-compatible probing hardware:

• Lab Assistant LA-200 HF manual 200 mm wafer probe system:
  • Manual wafer stage with 205 mm × 205 mm X and Y travel
  • 200 mm high frequency chuck with vacuum hold-down, selectable zones and integrated holders for calibration substrates
  • Large platen supporting manipulators and probe card configurations
  • Manual platen lift for setup and probe alignment
  • Stereo zoom microscope with up to 100× magnification, large working distance & integrated CCTV system
• Vibration isolation table for measurement stability
• Dark box enclosure providing light isolation and cable feedthroughs for RF connections
• Six MA-9000 manipulators
  • magnetic base, adjustable probe arm faceplates
  • four (4) coaxial probe arms
  • two (2) high frequency probe arms – West/East
• Probes – DC, 12.5 um radius tungsten; High Frequency, GSG, 150 um, 40 GHz