Semiautomatic PS4L Wafer Probe Station for Microfluidic MEMS Test

Specific Requirements:

A customer required a turnkey and integrated semiautomatic wafer probe system to test up to 200 mm microfluidic MEMS wafers, partial wafers, and individual die. The integrated solution had to provide a fully functional probing and high magnification inspection capabilities using one platform. Programmable manipulators would be used for electrical testing and fluidic dispense. The devices needed to be tested using top and bottom side contacts.

SemiProbe Solution:

• PS4L SA-8 semi-automatic 200 mm probe system:
  • 200 mm programmable X,Y,Z and theta stage with control electronics
  • 200 mm wafer chuck
  • PC/Monitor and PILOT Software Suite (Navigator, Wafer Map, Autoalign)
  • Vibration isolation table with casters, leveling feet and keyboard/monitor rack
  • Customized graphical user interface (GUI)
• Double side probing (top and bottom side)
• Custom carriers for whole wafers, partial wafers, and individual die
• Microfluidic Dispense System – input and output
• Four programmable X, Y, Z manipulators with coaxial, triaxial and high frequency probe arms
• Dark box and dark box feedthrough interconnect panel