Semiautomatic PS4L Wafer Probe Station for Device Characterization

Specific Requirements:

The customer required a highly configurable 200 mm semiautomatic wafer probe station for device characterization that would interface to a Keysight B15000 and be controlled via EasyExpert software. It had to operate from -60 °C to 200 °C, providing the ability to make multiple types of measurements – low leakage, low capacitance, low voltage, and low resistance as well as high frequency. High magnification optics to see features in the micron range were required.

SemiProbe Solution:

• PS4L SA-8 semi-automatic 200 mm probe system:
  • 200 mm programmable X,Y,Z and theta stage
  • 200 mm, gold plated triaxial thermal chuck with vacuum holes – operating from -60 °C to 200 °C, mounted to a large travel load-stroke for easy device loading and unloading
  • PC/Monitor, GPIB, and PILOT Software Suite (Navigator, Wafer Map, Autoalign)
  • TMC vibration isolation table with casters, leveling feet and keyboard/monitor rack
• Localized environmental chamber with top-hat to provide frost-free, dark and EMI shielding
• Large aluminum platen with stainless steel skin, removable front wedge, and a platen lift
• Second recessed platen for the additional Imina Technologies miBot nanopositioners
• Integrated microscope:
  • Compound microscope bridge with a 50 mm x 50 mm x 80 mm X, Y, Z travel
  • Compound microscope with 2x, 10x, 20x, 50x and 100x objectives
  • CCTV System with a color camera, color monitor, c-mount camera adapter
• Programmable and manual manipulators:
  • Four programmable three-axis manipulators with coaxial and triaxial probe arms
  • Four manual manipulators with coaxial, triaxial, and Kelvin probe arms
  • One manipulator with contact sense probe
  • Assorted boxes of tungsten probe tips (12.5 μm, 7 μm, 1 μm, and 0.1 μm radius)