Semiautomatic Magnetic Stimulation & Thermal Test Probe Station

Specific Requirements:

A research laboratory wanted a multi-purpose 200 mm semiautomatic probe system for magnet stimulation measurements. The contact to the device under test (DUT) was made using manual manipulators and high pin-count probe cards.

SemiProbe Solution:

• PS4L SA-8 MSS Semiautomatic 200 mm probe system with magnetic stimulation:
  • 200 mm programmable X, Y, Z and theta stage
  • Control electronics, PC and monitor
  • PILOT Software Suite – Navigator, Wafer Map and Autoalign
• Long working distance and high magnification optics with CCTV System
• Integrated GMW Model 5203 Vertical Projected Field Electromagnet with power supplies, controller and recirculating water chiller
• Interchangeable carrier plates for MSS measurement application – whole wafers and individual die
• Customized thermal system to provide +25 C to +225 C temperature capabilities
• Four (4) manual MA-9000 manipulators with coaxial probe arms and vacuum bases
• Probe Card Holder (PCH) with coarse and fine theta adjust
• Test Instrumentation Shelf
• Vibration Isolation Table with adjustable monitor/keyboard and mouse rack